Chancellor, Mechanical & Aerospace Engineering
The Henry Samueli School of Engineering
Professor, Biomedical Engineering
The Henry Samueli School of Engineering
Ph.D., Rijksuniversiteit, Ghent, Belgium, 1978, Semiconductor Electrochemistry
Phone: (949) 824-6585
Fax: (949)824-8585
University of California
S3231 Engineering Gateway
Mail Code: 3975
Irvine, CA 92697
Research Interests
Carbon MEMS, CD Microfluidics, 3D Microbattery, DNA Array, Polymer Actuators, Particle-Based Lithography
Academic Distinctions
1) Chancellor's Professor of Mechanical and Aerospace Engineering at UC Irvine, CA
2) Distinguished Honorary Professor IIT Kanpur
Appointments
SRI International ( Menlo Park, CA), Materials Scientist, Materials Research Laboratory
Publications
Authorship of Books, Chapters and Monographs:
[2002] Author of Fundamentals of Microfabrication, 2nd edition, CRC Press
Coeditor of Nano-and Micromechanical Systems (NEMS and MEMS) and Molecular machines.Editors: David A. LaVan, Arturo A. Ayon, Thomas E. Buchheit and M. J. Madou. MRS. Materials Research Society. Symposium Proceedings. Volume 741. Fall Meeting 2002 (December 2-4, 2002, Boston).
[2001] Author of two chapters for The MEMS Handbook, CRC Press.
[1997] Author of Fundamentals of Microfabrication, M. J. Madou, CRC Press, November 1997, Graduate level introduction to microfabrication, 589 pages. Fifth printing, Fall 2000.
Author of"Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review," M. J. Madou in Tribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop held in Columbus, Ohio, USA, 9-11 November 1997, edited by Bharat Bhushan for Kluwer Academic Publishers
[1996] Co-author of "Integrated Circuit Manufacturing Techniques Applied to Microfabrication," M. J. Madou and Hyunok Lynn Kim, Chapter 3 in Handbook of Chemical and Biological Sensors, edited by R. F. Taylor and J. S. Schultz for OIP, 1996.
[1992] Co-author. Madou, M. J., S. Oh, and F. de Schutter, 1992. Overview of Solid Electrolytes for Sensors, Proceedings of the International School of Materials Science and Technology. 24th Course: Solid State Ionics for Sensors and Electrochromics Erice-Sicily: 1-12 July 1992.
[1991] Author of a chapter and editor of volume: "Applications of Micromachining in Solid-State Chemical Sensors," M. Madou and J. Joseph, Eds. in "Opportunities for Innovation: Chemical and Biological Sensors Washington: National Institute of Science and Technology (1991). NIST Publication GCR 91-593-1 [Oct. 1991].
[1989] Author of Chemical Sensing with Solid State Devices, M. J. Madou and S. R. Morrison, Academic Press, 1989. Graduate level introduction to solid state chemical sensors, 556 pages.
[1987] Author of Chemical Sensors, Business Intelligence Program, 751 SRI International, 1987, M. J. Madou, G. S. Gaisford, and F. Gentile.
Author and coeditor of SRI Microscience Program volume on sensors. "Chemical Sensors for Extreme Environments,"1987.
Peer Reviewed Journal Articles:
Madou, M. J., W. Gomes, and F. Cardon, 1977. Impedance Measurements of n- and p-Type GaP Single Crystal Electrodes, J. Electrochem. Soc., vol. 124, no. 10, pp. 1623-1627 (October).
Madou, M. J ., W. Gomes, and F. Cardon, 1977. Anodic Processes at the n- and p-Type GaP Electrodes, Ber. Bunsenges. Phys. Chem., vol. 81, no. 11, pp. 1186-1190 (November).
Madou, M. J., W. Gomes, and F. Cardon, 1978. Cyclic-Voltammetric Study of n- and p-type GaP Electrodes, Ber. Busenges Phys. Chem., vol. 82, pp. 819-823.
Madou, M. J., K. W. Frese, Jr., and S. R. Morrison, 1979. Electron Exchange at the Surface of Thermally Grown Silicon, J. Electrochem. Soc., vol. 126, no. 10, pp. 1827-1828 (October).
Madou, M. J., K. W. Frese, Jr., and S. R. Morrison, 1980. The Si/SiO2 Electrode, Phys. Stat. Solidi (a), vol. 57, pp. 705-712.
Madou, M. J., K. W. Frese, Jr., and S. R. Morrison, 1980. Influence of Surface Damage on Stabilization Against Photodecomposition of n-type GaAs, J. Electrochem. Soc., vol. 127, no. 4, pp. 987-989 (April).
Madou, M. J., K. W. Frese, Jr., and S. R. Morrison, 1980. Photoelectrochemical Corrosion as Influenced by an Oxide Layer, J. Phys. Chem., vol. 84, no. 25, pp. 3423-3428.
Frese, K. W., Jr., M. J. Madou, and S. R. Morrison, 1980. Investigation of Photoelectrochemical Corrosion of Semiconductors, J. Phys. Chem., vol. 84, no. 24, pp. 3712-3718.
Morrison, S. R., M. J. Madou, and K. W. Frese, Jr., 1980. Imperfections in and Ion Diffusion through Oxide Layer in Silicon, Applic. Surf. Sci., vol. 6, pp. 138-148.
Frese, K. W., Jr., M. J. Madou, and S. R Morrison, 1981. Investigation of Photoelectro-Chemical Corrosion of Semiconductors, II. Kinetic Analysis of Corrosion-Competitive Reactions on n-GaAs, J. Electrochem. Soc., vol. 128, no. 7, pp. 1527-1531 (July).
Frese, K. W., Jr., M. J. Madou, and S. R. Morrison, 1981. Investigation of Photoelectro-chemical Corrosion of Semiconductors, III. Effects of Metal Layers on the Stability of GaAs, J. Electrochem. Soc., vol. 128, no. 9, pp. 1939-1943 (September).
Madou, M. J., B. H. Loo, K. W. Frese, Jr., and S. R. Morrison, 1981. Bulk and Surface Characterization of the Silicon Electrode, Surface Sci., vol. 108, pp. 135-152.
Brondeel, P., M. J. Madou, W. P. Gomes, and F. Cardon, 1982. Investigation on Photoelectro-chemical Cells Based upon Silicon/Methanol Interfaces. Part 1: n-Type Si, Solar Energy Matls., vol. 7, pp. 23-32.
Madou, M. J., P. Brondeel, W. P. Gomes, P. Hanselaer, and F. Cardon, 1982. Investigation on Photoelectrochemical Cells Based upon Silicon/Methanol Interfaces. Part 2: p-Type Si, Solar Energy Matls., vol. 7, pp. 33-42.
Madou, M. J., W. P. Gomes, F. Fransen, and F. Cardon, 1982. Anodic Oxidation of p-Type Silicon in Methanol as Compared to Glycol, J. Electrochem. Soc., vol. 129, no. 12, pp. 2749-2752 (December).
Madou, M. J., and M. C. H. McKubre, 1983. Impedance Measurements and Photoeffects on Ni-Electrodes, J. Electrochem. Soc., vol. 130, no. 5, pp. 1056-1061 (May).
Fransen, F., M. J. Madou, W. H. Laflere, F. Cardon, and W. P. Gomes, 1983. On the Dielectric Properties of Semiconducting Materials as Obtained from Impedance Measurements on Schottky Barriers, J. Phys. D (Appl. Phys.), vol. 16, pp. 879-888.
Madou, M. J., K. Kinoshita, and M. C. H. McKubre, 1983. Electrochemical Studies on the Cathodic Reduction of Thionyl Chloride, J. Electrochem. Soc., vol. 130, no. 3, p. 126C (March).
Kinoshita, K., and M. J. Madou, 1984. Electrochemical Measurements on Pt, Ir, and Ti Oxides as pH Probes, J. Electrochem. Soc., vol. 131, no. 5, pp. 1089-1094 (May).
Madou, M. J., and K. Kinoshita, 1984. Electrochemical Measurements on Metal Oxides for pH Probing, Part I, Electrochim. Acta, vol. 29, no. 3, pp. 411-414.
Madou, M. J., and K. Kinoshita, 1984. Electrochemical Measurements on Metal Oxides for pH Probing, Part II, Electrochim. Acta, vol. 29, no. 3, pp. 419-423.
Madou, M. J., and S. Szpak, 1984. Investigation of SOCl2 Reduction by Cyclic Voltammetry and AC Impedance Measurements, J. Electrochem. Soc., vol. 131, no. 11, pp. 2471-2483 (November).
Mercier, J. J., F. Fransen, F. Cardon, M. J. Madou, and W. P. Gomes, 1985. Effects of Anodic Polarization upon Electrochemically Grown Oxide Films on p-Si, Studied by Ellipsometric and Capacitance Measurements, Ber. Bunsenges. Phys. Chem., vol. 89, pp. 117-120.
G. H. Tsau, A. Sher , M. Madou, J. A. Wilson, V. A. Cotton adn C. E. Jones, 1985. Low-frequency admittance measurements on the HgCdTe/PhotoxSiO2 interface, J. Appl. Phys. 59(4), 1238-1244.
Madou, M. J., J. J. Smith, and S. Szpack, 1987. Comments on Electroreduction of SOCl2, J. Electrochem. Soc., vol. 134, p. 2794.
Madou, M. J., S. R. Morrison, and V. P. Bondarenko, 1988. Introduction of Impurities in Anodically Grown Silica, J. Electrochem. Soc., vol. 135, no.1 (January).
Tsau, G.-H., A. Sher, M. J. Madou, J. A. Wilson, V. A. Cotton, and C. E. Jones, 1988. State Characterization of the Hg1-xCdxTe/PhotoxTM SiO2 Interface, J. Vac. Sci. Technol. A, vol. 4, no. 4.
Madou, M. J., and T. Otagawa, 1988. Electrolytic Media for Chemical Sensors, Solid State Ionics, pp. 28-30.
Krishnamurthy, S., A. Sher, M. J. Madou, and A.-B. Chen, 1988. Semiconductor Alloys for Fast Thermal Sensors, J. Appl. Phys., vol. 64, no. 3, p. 1530.
Otagawa, T., M. J. Madou, S. Wing, J. Rich Alexander, S. Kusanagi, T. Fujioka, and A. Yasuda, 1990. Planar Microelectrochemical Carbon Monoxide Sensors, Sensors and Actuators, B1, 319.
Itoh, K., and M. J. Madou, 1991. Optical Waveguides for Surface Spectroscopy: FePO4 Thin-Film/K+-doped Glass Composite Optical Waveguide Systems Having Tapered Velocity Couplers, J. Appl. Phys., vol. 69, no. 11, p. 1.
Oh, S., J. Joseph, T. Otagawa, and M. J. Madou, 1992. Multilayer Ionic Devices Fabricated by the Plasma Spray Method, Solid State Ionics, vol. 53-56, pp. 90-94.
Fariborz, M., J. Joseph, and M. J. Madou, 1992. Feasibility and Practicality of Monolithic Sensors, Sensors, pp. 31-35 (September).
Madou, M., T. Otagawa, M. Tierney, J. Joseph, and S. Oh, 1992. Multilayer Ionic Devices Fabricated by Thin and Thick Film Technologies, Solid State Ionics, vol. 53-56, pp. 47-57.
Madou, M. J., and M. Tierney, 1992. Biosensors and Microfabrication, Invited paper Applied Biochemistry and Biotechnology.
Madou, M. J., and M. Tierney, 1993. Required Technology Breakthroughs to Assume Widely Accepted Biosensors, Invited paper, Applied Biochemistry and Biotechnology, vol. 41.
Madou, M. J., and J. Joseph, 1993. Immunosensors with Commercial Potential, Immunomethods, vol. 3, pp. 134-152. Invited review article.
Michael J. Tierney, Hyun-Ok L. Kim, Marc Madou and Takaaki Otagawa, 1993. Microelectrochemical sensor for nitrogen oxides, Sensors adn Actuators B, 13-14 (1993) 408-411.
Oh, S., and M. J. Madou, 1992. Planar-Type, Gas Diffusion-Controlled Oxygen Sensor Fabricated by the Plasma Spray Method, Sensors and Actuators B, vol. 13-14, pp. 581-582.
Somps, C. J., J. L. Pickering, M. J. Madou, J. W. Hines, D. L. Gibbs, and M. R. Harrison, 1996. Electrochemical Performance of an Ion Selective, Polymeric Membrane Following Chronic Implantation in Rat Subcutaneous Tissue, Sensors and Actuators B, vol. 35-36, pp. 222-227.
Wang, C. C., S. A. Akbar, and M. J. Madou, 1998. Ceramic Based Resistive Sensors, J. Electroceramics, vol. 2, no. 4, pp. 1-10, Special Issue on Sensor Materials.
Kim, J., X. Song, K. Kinoshita, M. J. Madou, and R. White, 1998. Electrochemical Studies of Carbon Films from Pyrolyzed Photoresist, J. Electrochem. Soc., vol. 145, no. 7, pp. 2314-2319.
Zent, A. P., R. C. Quinn, and M. Madou, 1998. A Thermo-Acoustic Gas Sensor Array for the Detection of Photochemically Critical Species in the Martian Atmosphere, Planetary Space Science, vol. 46, pp. 795-803.
Low, L-M., S. Seetharaman, K-Q. He, and M. J. Madou, 2000. Microactuators Toward Microvalves for Responsive Controlled Drug Delivery, Sensors and Actuators B, vol. 67, pp. 149-160.
Madou, M. J., and J. Florkey, 2000. From Batch to Continuous Manufacturing of Microbiomedical Devices, Chemical Reviews, vol. 100, pp. 2679-2691.
Madou, M. J., and K-Q. He, 2000. Exploitation of a Novel Artificial Muscle for Controlled Drug Delivery, Polym. Mater. Sci. Eng., vol. 83, pp. 495-497.
Ranganathan, S., R. McCreery, S. M. Maijji, and M. J. Madou, 2000. Photoresist-Derived Carbon for Microelectromechanical Systems and Electrochemical Applications, J. Electrochem. Soc., vol. 147, pp. 277-282.
Sheng Yao, Min Wang, and Marc Madou, 2001, A pH Electrode Based on Melt-Oxidized Iridium Oxide, Journal of The Electrochemical Society, 148(4)H29-H36
Johnson, R. D., I. H. A. Badr, G. Barrett, S. Lai, Y. Lu, M. J. Madou, and L. G. Bachas, 2001. Development of a Fully-Integrated Analysis System for Ions Based on Ion-Selective Optodes and Centrifugal Microfluidics, Anal. Chem., vol. 73, pp. 3940-3946.
Madou, M. J., Y. Lu, S. Lai, C. G. Koh, Y-J Juang, L. J. Lee, and B. Wenner, 2001. A Novel Design on a CD Disk for 2-Point Calibration Measurement, Sensors and Actuators A, vol. 91, no. 3, pp. 301-306.
Madou, M. J., L. J. Lee, S. Daunert, S. Lai, and C. H. Shih, 2001. Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Microfluidic Functions, Biomedical Microdevices, vol. 3, no. 3, pp. 245-254.
Lee, L. J., M. J. Madou, K. W. Koelling, S. Daunert, S. Lai, C. G. Koh, Y-J Juang, Y. Lu, and L. Yu, 2001. Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Polymer-Based Microfabrication, Biomedical Microdevices, vol. 3, no. 4, pp. 339-351.
Huang,Y., E. Mather, J. Bell, and M. Madou, 2002. MEMS-Based Sample Preparation for Molecular Diagnostics, Anal. Bioanal. Chem., vol. 372, pp. 49-65.
Madou, M. J., L. J. Lee, K. W. Koelling, S. Daunert, S. Lai, C. G. Koh, Y-J Juang, L. Yu, and Y. Lu, 2001. Design and Fabrication of Polymer Microfluidic Platforms for Biomedical Applications, ANTEC-SPE 59th, vol. 3, pp. 2534-2538 (May).
Wang, M., S. Yao, and M. Madou, 2002. A Long-Term Stable Iridium Oxide pH Electrode, Sensors and Actuators Part B, Chemical , vol. 81, no. 2-3, pp. 313-315.
Badr, I. H. A., R. D. Johnson, M. J. Madou, and L. G. Bachas, 2002. Fluorescent Ion-Selective Optode Membranes Incorporated onto a Centrifugal Microfluidics Platform, accepted by Anal. Chem.
Yu, L., C. G. Koh, L. J. Lee, K. W. Koelling, and M. J. Madou, 2002. Experimental Investigation and Numerical Simulation of Injection Molding with Micro-Features, accepted by Polymer Engineering and Science.
Kassegne, S., H. Reese, P. Swanson, and M. J. Madou, 2002. Micro Electro-Optical DNA Array Sensor, full paper accepted for publication at the SPIE Conference on Smart Structures and Materials, San Diego, CA, March 17-21.
Kassegne, S., R. Whitten, and M. J. Madou, 2002. Design Issues in SOI-Based High-Sensitivity Piezoresistive Cantilever Devices, full paper accepted for publication at the SPIE Conference on Smart Structures and Materials, San Diego, CA, March 17-21.
Amit Singh, Jaishankar Jayaram, Marc. Madou, and Sheikh Akbar,2002. Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications, Journal of The Electrochemical Society, 149(3) E78-E83.
Deo, S.K., E.A.Moschou, S.F.Petue, L.G.Bachas, S.Daunert, P.Eisenhardt and M.J.Madou,"Responsive Drug Delivery Systems", May 1, Anal.Chem., 207A-213A, 2003.
Moshou,E., S.F.Petue, L.G.Bachas, M.J.Madou, and S. Daunert,"Novel Artificial Muscle Material with Fast Electroactuation under Neutral pH Conditions", Adv.Mat., submitted 2003.
Jim Zoval and Marc J. Madou, "Centrifuge Based Fluidic Platforms, " scheduled for publication in the special issue of the PROCEEDINGS OF THE IEEE on Biomedical Applications for MEMS and Microfluidics.
J. D. Ehrick, S. K. Deo, L. G. Bachas, M. J. Madou, and S. Daunert, "Stimuli-Sensitive Hydrogels with Tailored Response Characteristics: Integration of Genetically Engineered Proteins with Synthetic Networks", to be submitted, 2003.
L. G. Puckett, E. Dikici, S. Lai, M. Madou, L. G. Bachas, and S. Daunert, "Investigation Into the Applicability of the Centrifugal Microfluidics Platform for the Development of Protein-Ligand Binding Assays Incorporating EGFP as a Fluorescent Reporter", to be submitted, 2003.
A. Rothert, L. Millner, L. G. Puckett, S. K. Deo, M. J. Madou, and S. Daunert, "Reporter Based Protein Quantitative Whole Cell Assay Adapted to a Compact Disc Microfluidics Platform", to be submitted, 2003.
Samuel K. Kassegne, Howard Reese, Dalibor Hodko, Joon M. Yang, Kamal Sarkar, Dan Smolko, Paul Swanson, Daniel E. Raymond,Michael J. Heller, Marc J. Madou, 2003, "Numerical modeling of transport and accumulation of DNA on electronically active biochips", Sensors and Actuators B. 94(2003) 81-98
J.Zoval, Richard Boulanger, Charles Blackwell, Bruce Borchers, Michael Flynn, David Smernoff, Ragnhild Landheim, Rocco Mancinelli and Marc J. Madou, "Rotating Disc Analytical System for Cell Viability," Manuscript in preparation.
M.J.Madou, Cubiciotti, R.,"Scaling Issues in Chemical and Biological Sensors (Invited Paper),"IEEE, Special Issue on Chemical and Biological Microsensors. Eds. Casalnuovo, S and Brown R.B., 2003, volume 91, issue 6.
Kunal Vaed, John Florkey, Sheikh A. Akbar, Marc J. Madou, John J. Lannutti and Sean Cahill,"An Additive Micromolding Approach for the Development of Micromachined Ceramic Substrates for RF Applications," JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 13, NO. 3, JUNE 2004
Siyi Lai, Shengnian Wang, Jun Luo, L. James Lee, Shang-Tian Yang, and Marc J. Madou, 2003,"Design of a Compact Disk-like MIcrofluidic Platform for Enzyme-Linked Immunosorbent Assay ,Anal. Chem. 2003 ,76, 1832-2837
A. Rothert, L. Millner, L. G. Puckett, S. K. Deo, M. J. Madou, and S. Daunert, "Whole Cell Reporter Gene-Based Biosensing Systems on a Compact Disc Microfluidics Platform", Anal. Biochem. 342, 11-19, 2005.
E. A. Moschou, M. J. Madou, L. G. Bachas, and S. Daunert, "Voltage-Switchable Artificial Muscles Actuating at Near Neutral pH", Sens. Act. B., in press, 2005.
Elizabeth A. Moschou, Adrianne D. Nicholson, Guangyao Jia, Jim V. Zoval, Marc J. Madou, Leonidas G. Bachas, and Sylvia Daunert, "Design and Integration of Fractionation and Isolation Microfluidic Features on Centrifugal Microfluidic Platforms for the Analysis of Biomolecules ", Lab on a Chip , in press, 2005.
Elizabeth A. Moschou, Marc Madou, Leonidas G. Bachas, Sylvia Daunert, "Voltage-switchable artificial muscles actuating at near neutral pH", Sensors and Actuators B 115 (2006) 379-383.
Grants
1) Novel rapid molecular theranostic technologies for nucleic acid detection - Centre Hospitalier Universitaire de Quebec (09/01/04 - 08/31/07)
2) Microfluidic system for point of care diagnosis of GBS - National Institutes of Health (NIH) prime (09/01/04 - 08/31/09)
3) C-MEMS based microbattery arrays for miniature sensors -National Science Foundation (NSF) (09/01/04 - 08/31/07)
4) Modified photo proteins as labels and molecular switches - NIH prime (04/01/04 - 03/31/08)
5)Biocompatibility studies of C-MEMS - NSF US-India IRES (09/15/05 - 08/31/08)
6) UC MEXUS (01/01/00 - 06/30/07)
7) University of Kentuky (NIH-2) (04/01/04 - 03/31/07)
8) National Science Foundation (08/01/02 - 07/31/07)
Professional Societies
Founder and Director of Scientific Advisory Board, CHIPRx
Founder and Director of Scientific Advisory Board, SensIrOx
Member at Large of The Electrochemical Society (Sensors)
Scientific Advisory Board for Transducers 1997, Chicago
Scientific Advisory Board for Transducers 1999, Sendai
Scientific Advisory Board, Hilton Head Island 1998 and 2000
Organizing & Scientific Advisory Committee Nanotech 1999~02
Organizer and General Chairman BIO-MEMS 1999~00, SF, CA
Editor for Sensors and Actuators B, North & South America
Advisory Board of the NSF-IGERT (University of Kentucky)
NASA Ames Associate since 1994
SIM Session Organizer, Salt Lake City, 2002
MRS Symposium Organizer, Boston, Fall 2001, 2002 , 2003
Other Experience
Visiting Scientist
SRI International ( Menlo Park, CA) 1979—1980
Assistant Professor
Rijksuniversiteit (State University of Ghent) Ghent, Belgium 1978—1979
Assistant Professor
Rijksuniversiteit (State University of Ghent) Ghent, Belgium 1980—1981
Senior Materials Scientist
Materials Research Laboratory SRI International (Menlo Park, CA) 1981—1982
Founder and Manager of Microsensor Program
SRI International 1982—1983
Associate Director
Microsensor Department, SRI International (Menlo Park, CA) 1982—1989
Director
Microsensor Department, SRI International (Menlo Park, CA) 1983—1989
Vice Chairman and Founder
Teknekron Sensor Development Corporation (TSDC) (Menlo Park, CA) 1989—1993
Visiting Professor
Louisiana State University, Senior Scientific Advisor 1994—1995
Visiting Miller Professor
UC Berkeley 1995—1996
Visiting Scholar
UC Berkeley 1996—2000
Professor Materials,Chemistry
Ohio State University (OSU) 1997—2000
Center for Materials Research (CMR) Scholar (Endowed chair)
Ohio State University (OSU) 1997—2000
Director
NSF Center for Industrial Sensors and Measurements (CISM) Microfabrication Applications Principal 1997—2000
Vice President
Advanced Technology (Nanogen, San Diego, CA) 2001—2002
Principal and Founder
Microfabrication Applications (San Diego, CA) 1993—Pres
Associate
NASA Ames Research Center (Mountain View, CA) 1994—Pres
